For the manufacture of low resistance Si-SiC composite, the properties of reaction sintering in the green body of various mixed α-SiC powder size with the various carbon contents from 0wt% to 20wt% were investigated. The samples preparation was green body by CIP method under this condition, molten silicon infiltration process was conducted to reaction bonded silicon carbide. the results of sintered density, 3-point bending strength and resistance of analysis showed that varied carbon and silicon melt reacted to convert to fine β-SiC particle and the structure was changed to dense material. The amount of fine β-SiC particle was gradually increased as carbon content increase. According to mixed composite, it's mechanical and specific resistivity properties was strongly influenced by carbon content within 10wt% more then carbon content 10wt% was strongly influenced by phase transition.

저저항 Si-SiC 소결체 제조를 위해 α-SiC에서 조성과 C의 양을 변화시키면서 반응소결 특성을 고찰하였다. 시료준비는 정수압으로 성형체를 제조하였고, 용융Si 반응소결을 통해 시험편을 준비하였다. 반응소결체의 미세구조, 기계적 특성 및 전기저항 분석 결과 용융Si과 반응 후 미립의 β-SiC가 생성되었고, 치밀한 소결체를 형성하였다. 미립 β-SiC 생성량은 카본 양에 따라 증가하였다. 그리고 C함량 10wt%이내에서 기계?R전기저항특성은 입도조성 영향이 크고 카본 함량 10wt%이상에서는 상전이 반응의 영향이 큼을 알 수 있었다.

Keywords: silicon, silicon carbide,specific resistivity, bending strenth

Keywords: 실리콘, 실리콘카바이드, 저항특성, 굴곡강도